Semiconductor Thermal Mechanical Wear Resistant Fluid Handling Electronic PureSiC

PURE SiC™ HR (High-Resistivity) CVD Silicon Carbide Material Properties
   Trade Name   PURE SiC™ HR CVD Silicon Carbide
   Composition Chemical Vapor Deposition (CVD) Silicon Carbide
   Color    Black

   Property Units Test Value
   Density gm/cc ASTM-C20 3.21
   Crystal Size Microns Thin-Section 5
   Water Absorption % ASTM-373 0
   Gas Permeability -- -- 0
   Flexural Strength (MOR), 20 degrees C MPa(psi x 103) ASTM-F417 468(68)
   Elastic Modulus, 20 degrees C GPa (psi x 106) ASTM-F848 462(67)
   Poisson's Ratio, 20 degrees C -- ASTM-C848 0.21
   Compressive Strength MPa(psi x 103) ASTM-C773 --
   Hardness GPa(kg/mm2) KNOOP 1000 gm 27(2750)
    Rockwell 45 N --
   Tensile Strength, 25 degrees C MPa (psi x 103) ACMA TEST #4 --
   Fracture Toughness K(Ic) Mpa m1/2 NOTCHED BEAM 3.5
   Coefficient of Thermal Expansion, 25-1000 degrees C 1 x 10-6/degrees C ASTM-C372 3.1
   Specific Heat, 100 degrees C J/kg*K ASTM-E1269 --
   Thermal Shock Resistance, (delta)Tc degrees C NOTE 3 --
   Maximum Use Temperature degrees C NO-LOAD COND. 1600
   Dielectric Stength ac-kV/mm (acV/mil) ASTM-D116 --
   Dielectric Constant, 1MHz 25 degrees C ASTM-D150 --
   Dielectric Loss (tan delta) 1MHz 25 degrees C ASTM-D2520 --
   Volume Resistivity 25 degrees C ohm-cm ASTM-D1829 >106
500 degrees C ohm-cm ASTM-D1829 --
1000 degrees C ohm-cm ASTM-D1829 --
   Impingement -- Note 4 0.03
   Rubbing -- Note 4 --

This chart is intended to illustrate typical properties of advanced ceramic materials available from CoorsTek. The designer should recognize that exact properties may vary according to product configuration and can sometimes be tailored to meet specific requirements.

Contact CoorsTek for cost-effective design, development and manufacturing assistance. The information set forth herein is offered for comparison only, and is not to be construed as absolute engineering data or constituting a warranty or representation for which we assume legal responsibility.

Note 1: Data Measurements -- All data measurements are typical and made at room temperature unless otherwise noted.

Note 2: Composition Control -- All CoorsTek ceramic compositions are controlled using modern chemical spectrographic and x-ray fluorescent methods.

Note 3: Thermal shock resistance -- Test are run by quenching samples into water from various elevated temperatures. The change in temperature where a sharp decrease in flexural strength is observed is listed as (delta)Tc.

Note 4: Wear resistance -- Impingement tests are run by using a dry 240 grit fused alumina abrasive. The indices in the chart are calculated by dividing the material volume loss by the volume loss of an AD-85 alumina control. The lower in the index, the better the wear resistance.

*Ceramic property values vary somewhat with method of manufacture, size, and shape of part. Close control of values of most properties can be maintained if specified.
puresic

 

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