Yttria
Yttria Overview
Yttria (yttrium oxide, Y2O3) is a rare-earth ceramic which exhibits both exceptional plasma resistance and an aptitude for high-temperature applications. Yttria is often used to stabilize other ceramic compositions like zirconia.
CoorsTek Exyria™ yttria can be formed into both solid parts and coatings for parts requiring exceptional corrosion resistance. Applying a PlasmaResist™ coating to compatible ceramic and metal components creates a corrosively inert barrier of pure yttria.
- Plasma resistance
- High stability
- Heat resistance
- Various application methods
CoorsTek Formulations
Contact a CoorsTek expert to discuss a custom manufactured Yttria solution for your application.
Sample Applications by Industry:
Semiconductor
- Nozzles, plates, coatings
- Shapes: Tubes and sleeves
| Properties | Units | Value |
| Flexural Strength, MOR (20 °C) | MPa | 100 - 430 |
| Fracture Toughness, KIc | MPa m1/2 | 1.0 - 4.0 |
|
Thermal Conductivity (20 °C) |
W/m K | 10 - 14 |
| Coefficient of Thermal Expansion | 1x10-6/°C | 7.9 - 8.2 |
| Maximum Use Temperature | °C | 2000 |
| Dielectric Strength (6.35mm) | ac-kV/mm | 16.5 |
| Dielectric Loss (tan δ) | 1MHz, 25 °C |
4 x 10-4 |
| Volume Resistivity (25°C) | Ω-cm | 1014 to 1016 |