CVD SiC Coatings
CVD SiC Coatings Extend Ultra-Clean Performance to More Components
CoorsTek is also able to apply ultra-pure chemical vapor deposition (CVD) silicon carbide coatings on select graphite, siliconized silicon carbide, and silicon carbide substrates. This advanced ceramic coating technology provides the benefits of particle-free surface quality and enhanced corrosion resistance on larger, more cost-effective parts than possible with solid bulk CVD SiC.
PureSiC CVD SiC Coatings
PureSiC coatings are fine-grained silicon carbide coatings applied to graphite or siliconized SiC, optimized for epitaxial (epi), rapid thermal processing (RTP), and etch processes.
TPSS CVD SiC Coatings
TPSS coatings are traditional fine-grained SiC coatings used in high-temperature diffusion furnaces.
Clear Carbon™ Coatings
Clear Carbon™ SiC coatings provide high-temperature durability and uniform heat transfer. The high purity coarse-grained silicon carbide coatings applied to graphite for epitaxial applications.