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Exyria™ Yttria

Composition

Y2O3

Description

Exyria™ is a high-purity bulk yttria ceramic that exhibits extreme plasma etch-resistance. 

Example Process Applications

Columns
Property Units Value

Minor Chemistry, (Total)

ppm weight

500

Grain Size

μm

10-70

Flexural Strength (MOR), 3-point

MPa

140

Flexural Strength (MOR), 4-point

MPa

100

Fracture Toughness,  KIc

MPa-m1/2

1.2

Hardness, Vickers 500g

GPa

7

Hardness, Vickers 1000g

GPa

6

Coefficient of Thermal Expansion, (25°C-1000°C)

1 x 10-6/°C

7.9

Dielectric Strength, (1 mm)

ac-kV/mm

17.7

Volume Resistivity, (25°C)

ohm-cm

>1014

Volume Resistivity, (500°C)

ohm-cm

109

Volume Resistivity, (1000°C)

ohm-cm

4x105

Dielectric Constant, (1 MHz)

11.5

Dielectric Loss (tan δ), (1 MHz)

<10-4

The information provided on this chart is for general material property reference only.  The customer should recognize that exact properties of materials may vary according to product configuration but close control of values of most properties can be maintained, if specified. Nothing herein is provided, or is to be construed, as absolute engineering data or constituting a warranty or representation. Contact CoorsTek for cost-effective design, development and manufacturing assistance. CoorsTek has 300+ variations including various forming and firing processes, not all variants are represented in the present website.

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