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Yttria Coatings

Yttria coatings

PlasmaResist™ Yttria coatings combine the exceptional  etch resistance of a yttria surface combined with the strengths of a range of compatible ceramic and metal substrates.  These hybrid structures can be engineered to take advantage of the substrate's material properties.

For example, applying CoorsTek PlasmaResist yttria coating to a high-purity, semiconductor grade alumina component yields a structure which combines excellent plasma etch resistance with the RF transparency and low loss characteristics of the alumina structure.

Substrate Materials Examples

  • Alumina
  • Aluminum
  • Titanium



Each coating is engineered to meet the application. Contact CoorsTek for more information.



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