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Yttria

Composition

Y2O3

Description

Yttria excels in high-corrosion and high-temperature environments, primarily semiconductor manufacturing, because of its excellent mechanical and chemical stability.

Applications

  • Semiconductor etch equipment components
     

CoorsTek Formulations

Contact a CoorsTek expert to choose a Yttria solution for your application.

Columns
Property Units Value

Flexural Strength MOR, (20°C)

MPa

430

Compressive Strength, (20°C)

MPa

-

Fracture Toughness, KIc

MPa m1/2

1.0-4.0

Hardness, Rockwell 45N

R45N

-

Hardness, Knoop 1000gm

GPa

-

Maximum Use Temperature

°C

2000

Coefficient of Thermal Expansion, (25-1000°C)

1 x 10-6/°C

7.9-8.2

Thermal Shock Resistance, (∆T)

°C

130

Thermal Conductivity, (20°C)

W/m K

10.0-14.0

Dielectric Strength, (6.35mm)

ac-kV/mm

420

Dielectric Constant, (1 MHz)

25°C

11.5-13.5

Volume Resistivity, (25°C)

ohm-cm

1014->1016

The information provided on this chart is for general material property reference only.  The customer should recognize that exact properties of materials may vary according to product configuration but close control of values of most properties can be maintained, if specified. Nothing herein is provided, or is to be construed, as absolute engineering data or constituting a warranty or representation. Contact CoorsTek for cost-effective design, development and manufacturing assistance. CoorsTek has 300+ variations including various forming and firing processes, not all variants are represented in the present website.

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